INNO fibre optic temperature sensors ,temperature monitoring systems.
In the ultra-demanding world of semiconductor wafer processing, precise thermal control is not a luxury—it is the cornerstone of yield, throughput, and device quality. In the harsh RF (Radio Frequency) and plasma environments of etch and deposition, conventional electronic sensors falter, leading to process instability. FJINNO’s fluorescence fiber optic temperature sensors are engineered to thrive in these conditions, providing the real-time, reliable data you need to master your process.
The Challenge: Temperature Instability in Electrostatic Chucks (ESCs)
The temperature of the reaction zone on the electrostatic chuck (ESC) surface is a critical process variable. However, the powerful electromagnetic fields present in etchers and induction heaters severely interfere with electronic sensors, compromising their stability and accuracy. This leads directly to unpredictable ESC temperature control, reduced process windows, and lower yields.
The FJINNO Solution: Key Features for Uncompromising Process Control
1. Absolute Immunity to Electromagnetic Interference
Our sensors utilize a phosphorescent material sensitive to temperature at the fiber tip, an all-optical measurement method. They are not merely “resistant” but are fundamentally immune to EMI, RF, and plasma fields. This guarantees stable, accurate, and repeatable measurements inside the process chamber, every single time.
2. High-Precision, Real-Time Hot Spot Monitoring
Embed our sensors directly into the electrostatic chuck (ESC) base to provide dynamic, real-time, and reliable temperature information from critical hot spots. The fast response time and high accuracy enable the tightest possible process control and rapid thermal cycling, effectively evaluating the etcher’s operational state.
3. Long-Term Stability for Process & Fault Analysis
Enable long-term, online monitoring of the ESC’s temperature trends. This continuous data stream is invaluable for monitoring equipment health, enhancing system reliability, and performing advanced fault analysis, ensuring consistent performance from your capital equipment.
4. Advanced Self-Diagnostic Functionality
Reliability is paramount. Our system incorporates an intelligent self-diagnostic function. Through internal optical signal detection and sophisticated algorithms, it can effectively identify sensor fault types, preventing false alarms and incorrect reporting, thus safeguarding your process.
Technical Superiority of Our All-Optical Design
- Truly Passive, All-Optical Probe: The sensor head contains no electrical signals, only light. This eliminates any potential for arcing or interference and makes it a genuinely passive device.
- Non-Intrusive Measurement: The optical measurement method itself does not conduct or introduce heat, ensuring that the sensor does not influence the thermal dynamics of your ESC.
- Rapid Measurement Cycle: With a measurement period of less than 1 second, our system guarantees high-fidelity data that accurately captures rapid thermal transients.
Empower Your Process with an Expert Partner
As a dedicated manufacturer and supplier, we provide more than just a product; we offer a complete sensing solution. We specialize in custom and OEM / ODM partnerships, working with equipment manufacturers and fabs to integrate our technology seamlessly. Enhance your system’s reliability and push the boundaries of your process with FJINNO.
